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Target Design Conciliation & Application Review

Targets engineering team along with the customer determined the critical requirements for this machine application were:

Scalable motion control platform

Advanced motion control software tools

Distributed high speed motion bus

High resolution and high accuracy

High speed I/O

Direct drive hollow shaft and standard servo motors

Product Technology Selected

The manufacturer needed a total motion package that could manage a single four axis robot with 50 um end of arm tool accuracy at high transfer rates and be able to “plug” in additional 3-4 axis robots using the existing master controller. Target provided a 32 axis network based motion controller that has I/O supported over the same bus with advanced programming and software tools capable of

meeting the extremely high end motion and tuning requirements. Direct drive hollow shaft servo motors and standard solid shaft servo motors with absolute feedback encoders coupled with network bus based servo amplifiers provided the 24 bit absolute feedback resolution needed to meet the speed and accuracy goals.

Design Implementation

Target’s factory trained engineers worked side by side the Control’s Engineers of the manufacturer during early design phases greatly speeding up the initial motion controller programming cycle. Later stage testing and fine tuning using the advanced diagnostic and tuning tools provided by the motion controller manufacturer allowed Target and the customer to meet machine wafer transfer rates and far exceed end of arm tool accuracy.

Overall Success

The selected network based motion controller had the horse power and scalability to meet the demanding needs of the application. The availability of a wide range of network supported I/O motors and amplifiers made joining all the various components seamless. Target’s motion expertise and experience was critical to meeting the market timing of the application.

Application Profile

Industry - Semiconductor OEM equipment manufacturer.

Machine Type - Wafer Handling Robot

Application Challenge - A four axis robot needed distributed network control, high precision and accuracy for end-of arm tool, known position of arm at all times and modular design where additional robot modules could be simply added into the array without additional controls.